Active vibration isolators

Outstanding vibration isolation and fast settling times for high-precision systems

All operators of highly sensitive systems for measurements, production or laboratory, know about the necessity of vibration isolation. Vibrational excitation from the environment can be found everywhere. Even without consciously noticing them, they still have a negative impact on the accuracy, precision and productivity of your equipment and devices. Many systems have specific requirements regarding the maximum permissible vibration load. These are described by the so-called Vibration Criteria curves (VC curves). If the place of installation does not meet these requirements, proper operation cannot be guaranteed. On the other hand, many production machines and test devices, for example in the semiconductor industry, have moving XY-tables. In order to be able to drive high cycle rates, these tables must be operated with high acceleration, and the system must come to a stop as quick as possible. Seismion active isolators have a high level of active stabilization and at the same time large actuator forces, which significantly reduce settling time and thus allows higher cycle rates to be used.

Advantages of Seismion active vibration isolators compared to air spring isolators

The following diagrams show the isolation performance and transient response of active Seismion isolators compared to conventional air spring systems. The isolation is clearly superior to air springs, especially in the low-frequency range up to 10 Hz. Remaining vibrations on the isolated port are reduced by a factor of 7, sometimes even by a factor of 37 more than air spring isolators can achieve! The low frequency range is especially important, since foot-fall sound and building vibrations occur at these frequencies.

The transient response or settling time is also significantly improved. While air spring systems vibrate for several seconds, the Seismion active isolators bring the system to rest within fractions of a second.