Active vibration isolation for High-Precision Instruments
- Electron microscopy: SEM and FIB
- AFM and nanometrology
- Optical microscopy and interferometry
- Spectroscopy
- Precision metrology
- Moving stages and motion systems
- Vacuum and cleanroom applications
Outstanding isolation. Fast settling. No compromise.
Every sensitive measurement system has a maximum permissible vibration load, described by Vibration Criteria (VC) levels. If your installation site does not meet them, performance suffers. Seismion active isolators combine superior low-frequency isolation with very fast settling times – clearly outperforming conventional air spring systems.
One design language, every payload
A consistent product family with a unified design – from a 65 kg tabletop platform to multi-ton isolation systems. Each product is matched to a specific range of payloads and applications.
More than isolation: active stabilization
Seismion active isolators are in fact active stabilizers. They do not only decouple your instrument from floor vibration, they actively counteract both floor-borne vibration and forces generated by the instrument itself
Up to 37× lower transmitted vibration than passive air-spring isolators
Remaining vibration on the isolated platform is reduced by a factor of up to 37, compared to passive air spring isolators – especially below 10 Hz, where footfall and building noise dominate.
Settles within a fraction of a second
While passive air spring systems keep oscillating for several seconds, Seismion active isolators bring the platform to rest within fractions of a second – enabling higher cycle rates on moving XY stages and other applications.
Full active control in all 6 DOF
Active control forces in all six degrees of freedom, with continuous monitoring of the isolated platform.
Solutions for different applications
Seismion offers suitable active isolators for a wide range of different applications. Starting from our compact platform Reactio 2, which is a table-top device that covers payload ranges up to 140 kg, to the Atlas, which is a modular system consisting of compact feet units that carry up to one ton per unit. All the isolators offer active control forces in all 6 degrees of freedom.
Atlas D3 is a modular active isolation system with up to 400 kg per module. It features real-time condition monitoring with direct access to the internal sensor data, and the isolation performance can be adjusted via the controller box (feedback gain). An output for reading out on a PC or notebook is included.
- Load on each unit: up to 400 kg (1,600 kg for a set of 4 units)
- Condition monitoring: real-time, internal sensors
- Isolation performance: adjustable via controller box
- Data output: PC / notebook
Atlas is our modular active isolation system for heavy instruments. Each compact foot unit carries up to 1,000 kg and the units can be arranged in any number – systems of 10 tons or more are possible. Atlas is available in a standard version, a dynamic version with higher actuator forces for moving stages, and a feedforward version for maximum isolation performance.
- Load per module: up to 1,000 kg
- Scalability: 10 t and beyond
- Standard variant: for a wide range of applications
- Dynamic variant: for applications with moving stages and other excitations
- Feedforward control variant: for highest isolation performance
Reactio beams is an isolation system that consists of two beams. The two beams can be positioned at adjustable spacing to meet the required sizes:
- Load capacity (for two-element system): up to 600 kg or up to 1,200 kg
- Beam lengths: 400 / 600 / 800 mm
- Mounting: breadboards, M6/25 holes optional
Reactio 2 is our compact active isolation platform for tabletop instruments.
- Available in 500 x 400 mm (up to 65 kg payload) and 600 x 500 mm (up to 140 kg)
- Automatic levelling for load adjustment